The various degrees of integration of thin-film batteries on a silicon wafer are examined. All of them show limitations that make fabrication of batteries on a wafer not viable at present from a business standpoint.
The purpose of this thesis is to assess the application potential for solid-state thin-film batteries, particularly with regard to CMOS integration. Such batteries were developed with the aim of creating a power unit on a silicon microchip. The various degrees of integration of thin-film batteries on a silicon wafer are examined.
However, costs can be saved as no hermetic sealing is required for solid electrolyte batteries. In any case, the performance will determine whether it pays to produce Li-ion bulk batteries from thin-films or not. This paper assessed various application possibilities for thin-film batteries.
Thin-filmn batteries that can be attached to the chip during assembling or packaging after the fabrication process offer a number of promising application possibilities, many of which are already pursued today by thin-film battery start-up companies.
First they de- veloped a low temperature fabrication method for thin-film batteries. By supplying energy in the form of energized ions of a second material to the material that is being deposited they control the growth of the crystalline structure of the film and avoid annealing.
The low power consumption of CMOS technology makes thin-film batteries an appropriate power source for CMOS memories. The feasibility of fabricating ultra-thin solid-state batteries in a way compatible with microelectronics processing technology allows integration on a wafer.